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  • MEMS resonators

    Discussion in 'The main mechanical design forum' started by Bharadwaj, Nov 9, 2011.

    1. Bharadwaj

      Bharadwaj New Member

      Nov 2011
      Likes Received:
      Hello everyone,

      Happy to see this forum.

      I am trying to model a mems resonator using comsol software, and the core of the resonator is a Piezoelectric rectangular plate clamped at the center on either sides (center of the length). For our resonator to work, this structure must vibrate in contour or in plane mode with little or no out of plane deformation. What are the conditions for this to happen?? Also, can anyone please tell me how to calculate the vibrational fundamental modes or eigenfrequency for this structure?

      [FONT=tahoma, helvetica, arial, sans-serif]http://morenojoseali.blogspot.com/2010/05/aluminum-nitride-contour-mode-vibrating.html[/FONT]

      [FONT=tahoma, helvetica, arial, sans-serif]The image is presented on that link (the rectangle only). I am also interested in the length extensional mode (deformation along the length) and would be very grateful if someone could explain it or direct me to some place with answers. Being an electronics engineer, it is proving to be a lot to swallow. Would appreciate any help.[/FONT]

      Till later,

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